A Study on Storage Allocation in an Automated Semiconductor Manufacturing Facility

Authors

St´ephane Dauz`ere-P´er`es, Ecole des Mines de Saint-EtienneFollow
Claude Yugma, Ecole des Mines de Saint-EtienneFollow
Ahmed Ben Chaabane, Ecole des Mines de Saint-EtienneFollow
Ahmed Ben Chaabane, STMicroelectronicsFollow
Lionel Rulli`ere, STMicroelectronicsFollow
Gilles Lamiable, STMicroelectronicsFollow

Document Type

Research Paper

Publication Date

2012

Abstract

This paper deals with the allocation of storage capacity in the automated material handling environment of a semiconductor wafer manufacturing facility. The impact of the allocation of stokers to machines in semiconductor fabrication facilities (fabs) is very little studied, although it significantly impacts the efficiency of the Automated Material Handling System (AMHS). After motivating and describing the problem of allocating unitary stokers to machines, a first local approach is discussed. We then propose a Mixed Integer linear Programming model to solve the global problem with two objectives: Minimizing the total maximum travel distance of vehicles and balancing the utilization of unitary stokers. Based on real data, numerical experiments are performed on some small instances. The analysis shows the importance of some parameters and that the two objectives tend to conflict.

Comments

Paper 38

Publication Title

Progress in Material Handling Research: 2012

Recommended Citation

Dauz`ere-P´er`es, St´ephane; Yugma, Claude; Chaabane, Ahmed Ben; Chaabane, Ahmed Ben; Rulli`ere, Lionel; and Lamiable, Gilles, "A Study on Storage Allocation in an Automated Semiconductor Manufacturing Facility" (2012). 12th IMHRC Proceedings (Gardanne, France – 2012). 38.
https://digitalcommons.georgiasouthern.edu/pmhr_2012/38