Document Type
Article
Publication Date
4-1-2014
Publication Title
The Journal of Micromechanics and Microengineering
DOI
10.1088/0960-1317/24/5/057001
ISSN
1361-6439
Abstract
Multilayer soft lithography has become a powerful tool in analytical chemistry, biochemistry, material and life sciences, and medical research. Complex fluidic micro-circuits require reliable components that integrate easily into microchips. We introduce two novel approaches to master mold fabrication for constructing in-line micro-valves using SU-8. Our fabrication techniques enable robust and versatile integration of many lab-on-a-chip functions including filters, mixers, pumps, stream focusing and cell-culture chambers, with in-line valves. SU-8 created more robust valve master molds than the conventional positive photoresists used in multilayer soft lithography, but maintained the advantages of biocompatibility and rapid prototyping. As an example, we used valve master molds made of SU-8 to fabricate PDMS chips capable of precisely controlling beads or cells in solution.
Recommended Citation
Dy, Aaron, Alin Cosmanescu, James Sluka, James Glazier, Dwayne Stupack, Dragos Amarie.
2014.
"Fabricating Microfluidic Valve Master Molds in SU‐8 Photoresist."
The Journal of Micromechanics and Microengineering, 24 (5).
doi: 10.1088/0960-1317/24/5/057001
https://digitalcommons.georgiasouthern.edu/physics-facpubs/122
Comments
Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Article obtained from the The Journal of Micromechanics and Microengineering.