Physics & Astronomy: Faculty Publications
Document Type
Article
Publication Date
2015
Publication Title
Journal of Vacuum Science Technology A
DOI
10.1116/1.4901873
Abstract
The surface bonding configuration and kinetics of hydrogen desorption from InN grown by plasma-assisted atomic layer epitaxy have been investigated. High resolution electron energy loss spectra exhibited loss peaks assigned to a Fuchs–Kliewer surface phonon, N-N and N-H surface species. The surface N-N vibrations are attributed to surface defects. The observation of N-H but no In-Hsurface species suggested N-terminated InN. Isothermal desorption data were best fit by the first-order desorption kinetics with an activation energy of (0.88 ± 0.06) eV and pre-exponential factor of (1.5 ± 0.5) × 105 s−1.
Recommended Citation
Acharya, Ananta, Brian D. Thoms, Neeraj Nepal, Charles R. Eddy Jr..
2015.
"Surface Structure and Surface Kinetics of InN Grown by Plasma-Assisted Atomic Layer Epitaxy: A HREELS Study."
Journal of Vacuum Science Technology A, 33 (2): 021401.
doi: 10.1116/1.4901873
https://digitalcommons.georgiasouthern.edu/physics-facpubs/102
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