Document Type
Article
Publication Date
2015
Publication Title
Journal of Vacuum Science Technology A
DOI
10.1116/1.4901873
Abstract
The surface bonding configuration and kinetics of hydrogen desorption from InN grown by plasma-assisted atomic layer epitaxy have been investigated. High resolution electron energy loss spectra exhibited loss peaks assigned to a Fuchs–Kliewer surface phonon, N-N and N-H surface species. The surface N-N vibrations are attributed to surface defects. The observation of N-H but no In-Hsurface species suggested N-terminated InN. Isothermal desorption data were best fit by the first-order desorption kinetics with an activation energy of (0.88 ± 0.06) eV and pre-exponential factor of (1.5 ± 0.5) × 105 s−1.
Recommended Citation
Acharya, Ananta, Brian D. Thoms, Neeraj Nepal, Charles R. Eddy Jr..
2015.
"Surface Structure and Surface Kinetics of InN Grown by Plasma-Assisted Atomic Layer Epitaxy: A HREELS Study."
Journal of Vacuum Science Technology A, 33 (2): 021401.
doi: 10.1116/1.4901873
https://digitalcommons.georgiasouthern.edu/physics-facpubs/102
Comments
AIP authors only may post their articles (including the AIP version) on their own or their employers’ web sites. This includes the right to include the final publisher’s version of the article in the author’s institutional repository.