Measurement of Microscale Shear Forces during Chemical Mechanical Planarization, Robert D. White, Andrew J. Mueller, Minchul Shin, Douglas Gauthier, Vincent P. Manno, Chris B. Rogers
Minchul Shin

In Situ Metrology for Glass and Copper CMP, Minchul Shin, James Vlahakis, Vincent P. Manno, Chris B. Rogers, Edward Paul, Mansour Moinpour, Donald Hooper, Robert D. White
Minchul Shin

In Situ Coupled with Modeling to Improve Control and Operation of CMP Processes, Minchul Shin, James Vlahakis, Caprice Gray, Nicole Braun, Douglas Gauthier, Robert D. White, Chris B. Rogers, Vincent P. Manno
Minchul Shin