A Microfabricated Shear Sensor Array on a Chip With Pressure Gradient Calibration, Zhengxin Zhao, Minchul Shin, Judith M. Gallman, Robert D. White
Minchul Shin

Acoustic Velocity Measurement System Using CMUT Technology and a Nickel-on-Glass Process, Minchul Shin, Zhengxin Zhao, Paul DeBitetto, Robert D. White
Minchul Shin

Acoustic Velocity Measurement System Using CMUT Technology and a Nickel-on-Glass Process, Minchul Shin, Zhengxin Zhao, Paul DeBitetto, Robert D. White
Department of Mechanical Engineering Faculty Publications

A Microfabricated Shear Sensor Array on a Chip With Pressure Gradient Calibration, Zhengxin Zhao, Minchul Shin, Judith M. Gallman, Robert D. White
Department of Mechanical Engineering Faculty Publications

Acoustic Doppler Velocity Measurement System using Capacitive Micromachined Ultrasound Transducer Array Technology, Minchul Shin, Joshua S. Krause, Paul DeBitetto, Robert D. White
Minchul Shin

Capacitive Micromachined Ultrasound Doppler Velocity Sensor using a Nickel on Glass Process, Minchul Shin, Zhengxin Zhao, Peter DeBitetto, Robert D. White
Minchul Shin

Nickel on Glass Acoustic Microsystems, Robert D. White, Zhengxin Zhao, Minchul Shin, Joshua S. Krause, Shuangqin Liu
Minchul Shin

Measurement of Microscale Shear Forces during Chemical Mechanical Planarization, Robert D. White, Andrew J. Mueller, Minchul Shin, Douglas Gauthier, Vincent P. Manno, Chris B. Rogers
Minchul Shin

Characterization of a Micromachined Parylene-Based Thermal C-Shape Actuator, Minchul Shin, Aaron P. Gerratt, Cinzia Metallo, Alex Brindle, Brian Kierstead, Robert D. White
Minchul Shin

Capacitive Micromachined Ultrasound Doppler Velocity Sensor, Minchul Shin, Joshua S. Krause, Paul DeBitetto, Robert D. White
Minchul Shin

In Situ Metrology for Glass and Copper CMP, Minchul Shin, James Vlahakis, Vincent P. Manno, Chris B. Rogers, Edward Paul, Mansour Moinpour, Donald Hooper, Robert D. White
Minchul Shin

In Situ Coupled with Modeling to Improve Control and Operation of CMP Processes, Minchul Shin, James Vlahakis, Caprice Gray, Nicole Braun, Douglas Gauthier, Robert D. White, Chris B. Rogers, Vincent P. Manno
Minchul Shin