Part of the Engineering Commons
2011
Measurement of Microscale Shear Forces during Chemical Mechanical Planarization, Robert D. White, Andrew J. Mueller, Minchul Shin, Douglas Gauthier, Vincent P. Manno, Chris B. Rogers
Minchul Shin
2009
In Situ Coupled with Modeling to Improve Control and Operation of CMP Processes, Minchul Shin, James Vlahakis, Caprice Gray, Nicole Braun, Douglas Gauthier, Robert D. White, Chris B. Rogers, Vincent P. Manno
Minchul Shin
